개요

Display Panel 제조 공정 중 식각 및 박리 공정을 담당하는 설비

특징

Varrious Application
- Various Display Capabilities : LCD / OLED / Flexible - U&I Type In-Line (Slope / Horizon / DIP)

High Performance
- Etch Rate Uniformity ≤ 5%↓
- CD Bias Uniformity ≤ 0.5㎛
- Temp. Control Accuracy :±0.5℃↓

Outstanding Advantage
- Chemical Fume and Particle Free (Non-contact Magnetic Transfer Mechanism
- Improvement of C.o.O