개요

IRIS와 BLUEICE PRIME의 장점을 접목한 2X급 세정설비입니다.

특징

Process Performance

- High Grade Process (26nm)

Productivity / Hardware

- Contamination Free Clean by NIC Bowl
- New S2-Aerosol : High-Velocity / Uniformity Droplet
- Smart System : APAC (Auto Flow Control), Smart Equipment Analysis System, Auto Inspection System
- Energy Efficiency Rating : Class 1