개요

H-SOH 공정 대응 차세대 Photo설비 

특징

High Productivity

- Reduce Footprint and improved Throughput with a new SOH-exclusive Platform

Minimize Defects

- 2-block Vertical Robot System and optimized Environmental Control
- Contamination Prevention ni Baking Unit by supplying the Clean-air and improving Exhaust System
- Improved Air Flow Control System for Bake Chamber

Easy Maintanance

- Application of Equipment Condition Analysis and Self-diagnostic Function
- Improving Accessibility for easier Maintenance and Reducing MTBR