개요
S.LSI 공정에 최적화된 L1X급 대응 매엽식 세정/건조설비
특징
Process Performance
- High Grade Process (19nm)
- Defect Free Physical Cleaning
Productivity / Hardware
- Contamination Free Clean by NIC Bowl
- Leaning Free by CDA System
- SF-Aerosol : High-Velocity / Uniformity Droplet
- Smart System : APAC (Auto Flow Control), Smart Equipment Analysis System, Auto Inspection System
