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System Engineering Mega Solution

System Engineering Mega Solution

OHT System

Model

Series

Line Automation


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Overview

Line automation system for transferring various wafer packages with high cleanliness and high speed

 

Feature

- Transferring wafer packages with optimal path between manufacturing processes/equipments by OCS(OHT Control System)
- Transfer Target
  . FAB : FOUP, FOSB and Reticle
  . Backend : Cassette, Magazine and Tray
- Velocity
  . Straight / Curve : 3.3 / 1.0㎧
  . Acceleration / Deceleration : 2.5㎨ / 3.5㎨
- Branch/Join Method : Vehicle self switching
- Power Supply : CPS-Contact less Power Supply (duplexing)
- Transfer Interface
. Process Equipment, Stocker, Conveyor and Lifter

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.