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System Engineering Mega Solution

System Engineering Mega Solution

IRIS 12B

Model

Series

Semiconductor Equipment


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Overview

IRIS 12B is the 300mm single wafer processing equipment that can process front side and back side etching, stripping, bevel treatment, cleaning, rinsing and drying. 


Feature

Dual stack chamber

- Implemented a 2 story structure design to reduce footprint and improved chemical recycling to reduce overall CoO

High throughput 370WPH

- SEMES’ high speed transfer robot system and wafer handling scheduler increased production speed up to 370WPH

RAMs for CoO (Reliability Availability Maintainability for Cost of Ownership)

- Multi processing chamber unit with 2 chemical nozzles plus 3 optional nozzles adds versatility
- Consisted with sonic, aerosol, backside, bevel etching, IPA and optional nozzles for <45nm process.

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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