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System Engineering Mega Solution

System Engineering Mega Solution

LOTUS

Model

Series

Semiconductor Equipment


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Overview

Single Wafer Wet Clean/PR Strip Equipment for High Grade Process


Feature

Process Performance

- High Speed Robot Technology
- High Grade Process (19nm)
- High Temperature SPM Process Over 150℃

Productivity / Hardware

- Customized Chamber Configuration : 6, 9 or 12 Chambers
- State of the art Particle Improvement Technology
- User-Convenience (Vision Inspection, Tool Matching)
- Equipment Analysis and Diagnosis System

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.