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System Engineering Mega Solution

System Engineering Mega Solution

OMEGA K

Model

Series

Semiconductor Equipment


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Overview

The “All in one” platform design photo for KrF Inline Process. 


Feature

Defect Improvement

- Particle-free Robot System
- Separating Chemical and Rinse/Dry zine by Isolation Clean Bowl

Advanced Equipment Control System

- Application of Cylinder Auto Feed-back Control System and Chemical Flow Auto Feed-back Control System

Easy Maintenance

- Application of Equipment Condition Analysis and Self-diagnostic Function
- Improving Accessibility for easier Maintenance and Reducing MTBR

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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