Overview

The “All in one” platform design photo for KrF Inline Process. 

Feature

Defect Improvement

- Particle-free Robot System
- Separating Chemical and Rinse/Dry zine by Isolation Clean Bowl

Advanced Equipment Control System

- Application of Cylinder Auto Feed-back Control System and Chemical Flow Auto Feed-back Control System

Easy Maintenance

- Application of Equipment Condition Analysis and Self-diagnostic Function
- Improving Accessibility for easier Maintenance and Reducing MTBR