The “All in one” platform design photo for KrF Inline Process.
- Particle-free Robot System
- Separating Chemical and Rinse/Dry zine by Isolation Clean Bowl
Advanced Equipment Control System
- Application of Cylinder Auto Feed-back Control System and Chemical Flow Auto Feed-back Control System
- Application of Equipment Condition Analysis and Self-diagnostic Function
- Improving Accessibility for easier Maintenance and Reducing MTBR