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System Engineering Mega Solution

System Engineering Mega Solution

BLUEICE SPM

Model

Series

Semiconductor Equipment


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Overview

The 300mm single wafer processing equipment that is used for post CMP clean, PR strip, ashingless PR strip and metal removal processes.


Feature

Process Performance

- High Temperature SPM Process over 150℃
- PR Strip, Post CMP Clean, Metal Clean and etc.

Productivity / Hardware

- Contamination Free Clean by NIC Bowl
- H2SO4 Recycle System
- Energy Efficiency Rating : Class 1

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.