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BLUEICE SPM
Model Name
BLUEICE SPM
Series
Semiconductor Equipment
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Data
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Manufacturer information
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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer

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Manufacturer
System Engineering Mega Solution
Product Type
Machine
Brand
-
SKU
28945
Product Name
BLUEICE SPM
Model Name
BLUEICE SPM
Size
-
Weight
-
Product Details

Overview

The 300mm single wafer processing equipment that is used for post CMP clean, PR strip, ashingless PR strip and metal removal processes.


Feature

Process Performance

- High Temperature SPM Process over 150℃
- PR Strip, Post CMP Clean, Metal Clean and etc.

Productivity / Hardware

- Contamination Free Clean by NIC Bowl
- H2SO4 Recycle System
- Energy Efficiency Rating : Class 1

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System Engineering Mega Solution
System Engineering Mega Solution
Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
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