SPECIFICATIONS

EQUIP. DIMENSION

1,120(W)mm×700(L)mm×2200(H)mm

WEIGHT

500Kg

STICK SIZE

300 or 470 * 140H (협의 사항)

STICK THICKNESS

(0.3~0.7) x 2 mm

STICK JIG

28 Stick/1 JIG

STICK JIG LOADING 수량

4 jig / 1chamber (2 floor 구조)

CHAMBER SIZE

746 x 484 x 699H

T/TIME

112 Stick/20~30min

VACUUM PRESSURE

3x10^-3 Torr(0.39Pa) chamber interior vacuum

UTILITY

MAIN POWER:3Ø, 220V±10%, 3KW, 50/60Hz

Air  : 5~6 Kg/cm2 , 60ℓ/min
N2  : 3~41g/cm2 , 5ℓ/min