


APC200 Throttle ValveController
APC200 은 GPC3000 의 Upgrade Version 으로 Pressure&Flow Controller는 기본적으로 Capacitance Manometer에 Power(±15VDC)를 공급하고 이로부터 Pressure Signal을 받아들여 Display함과 동시에 Throttle Valve를 연결하고 PID또는 Self-Tuning 기능을 사용하여 Pressure를 Control하는 장치이다. 이 중에서 Self-Tuning기능을 사용하면 Chamber 내로 유입되는 Gas의 양, Pump Speed, Valve Position 별 진공 압력 변화, 그리고 기타 다른 중요한 Parameter들을 감지하여 Pressure Control Factor들을 습듭한다. User가 이 기능을 사용하여 Pressure Control을 할 경우 원하는 압력에 보다 빨리 도달 할 수 있다. Process Limit Relay가 2개 내장되어 있어 User의 장비 Process에 도움이 되도록 하였다.
Features & Benefit
■ APC200 에는 Option으로 최대 4개의 MFC를 연결할 수 있는 PCB Card가 준비되어 있으며 PCB 1장당 2 Channel(MFC 2개 연결)로 구성되어 있다.
■ APC200 은 아주 편리하고 간단하게 Local(Front Panel), I/O 또는 RS-232 / RS-485 Remote로 모든 제어가 가능하게 설계 되어 있다.
Dimensions



Specifications
| Valves Operated | ATV1000 Exhaust Throttle Valves, MKS Type 653 and Others |
Pressure Input Signal | Standard : 0-10 VDC |
| Input Power Required | 90-132 or 180-264 VAC, 50/60 Hz |
Set Point Programmable External Analog | 5 total, programmable in any combin for pressure or position (adjustable from the front panel or RS232/RS485 selectable from the front panel, TTL, or RS232/RS485) 0-10 VDC |
Controller Repeatability | ±0.1% of F.S |
Ambient Operating Temperature | 150C - 450C |
Output Power | ±15 VDC ±5% @ 1.5 Amp |
Analog Output Signal | 0-10 VDC for 0-100% valve position and 0-10 VDC for 1-100%, F.S pressure |
Size | 1/2-rack packing : 88mm H x 241mm W x 225 D |
Display | 240x(RGB) X 320 pixels Transmissive LCD (pressure, position and external set-point readout) |
Display Units Soft Start | Torr, mTorr, mbar, Pascal, cmH20, inH20, mbar, kpa Standard |
PID Control | Standard |
Remote Zero | Standard |
Interface | Front panel, Analog, TTL and RS232 , RS485 |
Relay Output | 2, process limits : 24 Volts AC/DC 0.5Amp resistive |
Remote Control Override (Open, Close, Hold) | Standard |
Position Control Capability | Standard |
Battery Backup | N/A |
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