Nano Manipultor&Probe by Saeron Technology - Komachine Supplier Profile and Product List

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This product is manufactured by

Saeron Technology

Website

+82 31-349-1411

This product is manufactured by

Saeron Technology

Nano Manipultor&Probe

Model Name

Series

Option&Sample Prep.

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Manufacturer information

Saeron Technology

Electronic microscope, Electron beam welding machine, Scanning electron microscope, Electron beam, FE-SEM and more

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Manufacturer

Saeron Technology

Product Type

Machine

Brand

SKU

142771

Product Name

Nano Manipultor&Probe

Model Name

Size

Weight

Product Details

Product Description

The intended use of the probe-station SMARPROBE is the positioning of probes to analyze or manipulate samples fixed onto its sample stage. The system can be used for atmospheric probing of large samples up to nano-probing of the latest semi-conductor technologies within an electron microscope. If the intended use is nano-probing it is recommended to choose the SMARPROBE LX with an active temperature control for low thermal drift (L) and/or with an extended scan range for vibration free fine-positioning (X). Typical applications of the SMARPROBE are:

Specifications

GENERAL SPECIFICATIONS
Operating Environment	HV (10-7 mbar), Ambient Conditions	Plasma Cleaning	Plasma Cleaning
Numbers of Manipulators	Up to 8	Coarse Driving Principle	Piezo Stick-Slip
Fine Driving Principle¹	Piezo Scanner	Relative Drift between Probe and Sample	>1,< 1 for L Extension
Max. Probing Area [mm]	25×25	Max. Sample Size [mm]	25×25, larger size will reduce the probing area
Min. SEM Working Distance [mm]	1 for 10×10 Samples 2 for 25×25 Samples	Base Materials	Aluminum/Titan
Dimensions Nanoprober, W x L x H [mm]	187 x 187 x 56 for 5-8 Manipulators (SP8) 156 x 156 x 56 for 2-4 Manipulators (SP4)