Saeron Technology
Saeron Technology
Description
AIS2300C
(Scanning Electron Microscope)
AIS2300C received Research Innovation Award for prominent scientific research in NANO Korea
Patents and Certifications : CE Certificates
NORMAL SEM AIS2300C
AIS2300C received Research Innovation Award for prominent scientific research in NANO Korea
- Proven model
stability and high performance - Upgraded
scan speed & Pixel resolution - Equipped with powerful
“Analysis S/W” & “Measurement tool”
Features
1) Low KeV (from 0.6kV) video-rate imaging – Non-coating
2) Resolved disadvantages of tablet SEMs such as internal vibration, heat, and EMI.
3) A mini-SEM with the world’s highest resolution
4) Minimal installation and operating space – 540(W) X 570(D) X 1300(H)mm³
5) Equipped with powerful analysis software and various measurement tools
6) Application of technology to reduce numerical values – For better resolution
7) ET-Type SE Detector (SE/BSE conversion mode)
Specifications
| ELECTRON OPTIC SYSTEM | |||
| Resolution | 3nm@SE | Magnification | 10X ~ 1,000,000X(Max.) (Additional Digital Zoom 2X, 4X, 8X) |
| Accelerating Voltage | 0.2kV ~ 30kV | Electron Gun Type | Tungsten Hair-pin Filament |
| Stage Motorization & Movement (X, Y, Z)mm | 5-Axis tage[X, Y, Z] = 60/70/65mm Tilt 20° ~ 60°(Max.105°) Rotation 360° Endless (Option : Large Stage & Chamber) |
Optic Lens | Electromagnetic Lens System5-Axis tage[X, Y, Z] = 60/70/65mm Tilt 20° ~ 60°(Max.105°) Rotation 360° Endless (Option : Large Stage & Chamber) |