Product Description : The world’s first developed E-beam micro joining system (micro welding)

Features

1) Welding and joining micro-sized parts with several nm resolutions: Probe current
2) A hybrid XEM combining SEM and joining
3) Commercialization of customized products – Technical consulting support
4) Micro-manipulator installable in the chamber
5) Options available for the installation of various functions (extensibility)
6) Video observation of real-time processing through BSE detector

Gun Specification

Source Tungsten Hair-Pin Filament(LaB6/ Th coated Tungsten Filament 적용 Available)

Low Power & High Performance

Fast response system for preventing welding

High welding quality and welding repeatability,

Possibility of gun mounting on a robotic manipulator

Voltage power 35KeV (Max.40KeV)

Beam current max. 50uA(Guaranty사양) – (최대 Ip ≥ 100uA)
Inspection Resolution : Minimum 5nm

Seam Tracking with BSE detector – Cooling System prevent damage from thernal-electron

Application

E-beam Micro Joining with surface cleanness.

Quality welding of metal with high reflexibility Ag, Cu, etc.

Micro Metal Powder Melting ; Ti, Al, Cobalt-Chrome, Alloy powder, etc.

Fine and complicated structure SOS (System on Chip), Precision Valve.

Wetting/Joining for CPU Casing, Gas Sensor.

Precision parts welding for Aircraft, Automobile industry, Aerospace and Power Engineering.