Manufacturer of Automobile facility, Super precision welding facility, Measuring inspection facility, Electron gun production facility
ITO Coater
This equipment deposits Indium Thin Oxide onto the parts’ surface by incorporating the Sputter & Thermal Heater method and is intended for Pattern Nb2o5/SiO2/ITO Plating of the G1F & G2 method implemented Touch Screen Panel in Smart Phones and Tablet PCs.
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Features |
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1 |
High |
User Friendly |
1. Rotative & Orbital Load/Unloading |
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Production Capacity |
1,080ea/1Hr, 4” based |
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2 |
Low |
Temp |
100˚↓ |
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Operating Cost |
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Coefficient Of Friction |
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Specification |
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Works Space |
L4500*D6500*H2700 |
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Weight |
4.5 Tons |
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Main |
Chamber |
Φ1,600*H1600 |
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Source |
Sputter+ Thermal Heater |
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Work Jig |
Φ125 * 28 Axis |
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Pump |
Diffusion Pump |
20” 1 Set |
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Rotary & Booster Pump |
gxs250 & EH2600 |
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Vacuum Level |
5*10-5torr |
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Option |
Chiller |
20RT |
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Poly Coldp |
100,000L/Sec |
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Comparison |
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Wise AF-1600 PeCVD ( Φ1,600 ) |
EIn Line Type |
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Capa |
Batch Time |
60min |
Long |
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Glass Size |
4” |
7” |
10.1” |
Optimized |
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1 Batch |
1,080 |
320 |
192 |
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Day [22Hr] |
35,640 |
10,560 |
6,336 |
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Month [26Day] |
926,640 |
274,560 |
164,736 |
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Deposition Temp |
100~150℃ |
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Target |
Rotative & Orbital Magazine 12ea |
Titanium Carrier |
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