The intended use of the probe-station SMARPROBE is the positioning of probes to analyze or manipulate samples fixed onto its sample stage. The system can be used for atmospheric probing of large samples up to nano-probing of the latest semi-conductor technologies within an electron microscope. If the intended use is nano-probing it is recommended to choose the SMARPROBE LX with an active temperature control for low thermal drift (L) and/or with an extended scan range for vibration free fine-positioning (X). Typical applications of the SMARPROBE are:
제품사양
GENERAL SPECIFICATIONS
Operating Environment
HV (10-7 mbar), Ambient Conditions
Plasma Cleaning
Plasma Cleaning
Numbers of Manipulators
Up to 8
Coarse Driving Principle
Piezo Stick-Slip
Fine Driving Principle¹
Piezo Scanner
Relative Drift between Probe and Sample
>1,< 1 for L Extension
Max. Probing Area [mm]
25×25
Max. Sample Size [mm]
25×25, larger size will reduce the probing area
Min. SEM Working Distance [mm]
1 for 10×10 Samples 2 for 25×25 Samples
Base Materials
Aluminum/Titan
Dimensions Nanoprober, W x L x H [mm]
187 x 187 x 56 for 5-8 Manipulators (SP8) 156 x 156 x 56 for 2-4 Manipulators (SP4)
