Model

EKF-000

ECL-000

EAF-000

Wave length

248 nm

308 nm

193 nm

Gas

KrF

XeCl

ArF

Repetion rate(Hz)

50, 100, 500, 1000

Energy/pulse (mJ)

10, 30, 50, 100. 500, 1000

Cooling

1st water, 2nd air or water

Weight

chamber : ≤ 100 kg

Dimension

723(L) x 244(w) x 194(H)