
Overview
An evaporator uses an electric resistance heater or high-energy beam to melt material
and to raise its vapor pressure to a useful range. This process takes place in a high
vacuum state to allow the vapor to reach the substrate without reacting with or
scattering against other gas-phase atoms in the chamber while reducing the
incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series
evaporation systems are capable of fabricating multi-layer thin films by applying this
co-deposition process.
≻ Excellent Thickness Uniformity
The KVE Series E-Beam&Thermal Evaporator System provide excellent thickness uniformity
of resultant films. And if you deposit the thin films to same condition, you will get the thin
films of same feature.
≻ Combination system
This system has E-beam source and thermal source. Therefore, you can deposit thin
films of various properties.