



진공증착, 식각장비, 세정장비, 진공부품 등 진공 시스템 전문업체

Overview
An evaporator uses an electric resistance heater or high-energy beam to melt material
and to raise its vapor pressure to a useful range. This process takes place in a high
vacuum state to allow the vapor to reach the substrate without reacting with or
scattering against other gas-phase atoms in the chamber while reducing the
incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series
evaporation systems are capable of fabricating multi-layer thin films by applying this
co-deposition process.
≻ Excellent Thickness Uniformity
The KVE Series E-Beam&Thermal Evaporator System provide excellent thickness uniformity
of resultant films. And if you deposit the thin films to same condition, you will get the thin
films of same feature.
≻ Combination system
This system has E-beam source and thermal source. Therefore, you can deposit thin
films of various properties.
| Process Chamber | Stainless steel | 
| Vacuum Pumping Station | Cryo, TMP | 
| Loadlock Chamber | Optional item | 
| Substrate Unit | Rotation / Heating | 
| Sample Size | 4inch ~ | 
| Process pressure | < 5.0E-4Torr | 
| Vacuum Gauge Controller | ATM ~ 1.0E-10Torr | 
| Power Supply Unit | 6kW, 8kW, 10kW | 
| Crucible Size | 4cc, 7cc, 15cc, 25cc | 
| Pocket Number | Single, 4,6 | 
| Thermal source | W boat, 10V, 300A | 
| Film Thickness Uniformity | < ±5% | 
| Ultimate Pressure | < 5.0E-7Torr | 
| System Control | PC auto / PLC Semi-auto | 

