METALLION ™ is the surface coating equipment which utilizes an arc discharge, ion plating.
System Specification
| Chamber Size |
Ø1000×H1200, Custom-made |
| Jig System |
2 fold or 3 fold |
| Working Gas |
Mass flow control system
Ar · N2 · etc |
| Plasma Source |
5" Cathodic Arc Source
(Auto trigger, Direct Water Cooling) |
The Initial
Vaccum Degree |
~10-6Torr |
| Bias Power |
Pulsed DC |
| Heater |
Max 480℃ |
| Device Operation |
Automatic / Semi-automatic |
Advantages
• Can deposit on variety coating films
• High-deposition and ionization rate
• Excellent adhesion on the metal substrate
• High adgesion to the substrate
• High productivity and ease of maintenance

Applications
By selecting the appropriate Target Material TiN, TiCN, TiAlN, AlTiN, CrN, and NANO QUARTET™ coatingm, plenty coatings are available.
