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J&L Tech

CARBOZEN™-LAB

Model

Series

Coating System


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Carbozen - ™ Lab Series can perform high quality coating in lab scale size.
It is able to provide multiple kinds of coating on the product utilizing a glow discharge method.

 

Specification

Chamber size Ø500×H250mm
Deposition rate 300mm per hour
Cathode size Ø300 mm
Plasma source Linear ion source, UBM sputter, Cathodic arc

 

주요특징

• 개발예산에 맞춰 다양한 옵션 선택 가능 (선택옵션에 따라 가격 조절이 가능)
• 20년 동안 축적해온 양산 코팅 기술로 최적화된 솔루션 제공
• 코팅공정의 설계, 수정이 용이한 전자동 소프트웨어

 

Product Models

●=Standard / ●=Option

Components Full Option PECVD Sputtering Metal-ARC Specifications
Rotary pump 4~60 m3/h
Turbo pump 200~400 l/s
Throttl Valve     Blade type
Baratron Gauge     0.1~1torr
Pressure Controller     Automatic Control
Heater 400~500℃
1 Fold Turntable     3 Axis Rotation
2 Fold Turntable 3 Axis Rotation & Revolution
Sputter DC Power Supply     2KW DC
Ion Source DC Power Supply   10KW DC
Cathodic Arc Power Supply     5KW DC
Bias Power Supply 5KW 350khz
Cathode Power Supply     AC or RF
4 Inch Sputter Source     Unbalanced Magnetron Sputter
4 Inch Ion Source Closed drift Type
3 Inch Cathodic Arc Source     Direct cooling Type

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.