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J&L Tech

CARBOZEN™-C

Model

Series

Coating System


Transaction Process

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Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Carbozen ™ -C(PECVD : Plasma Enhanced CVD) SERIES is in the CVD method which uses plasma and it demands decompose ion gas, utilizing a generated glow discharge.

 

System Specification

Chamber Size Custom-made
Working Gas Mass flow control system
Ar · O2 · C2H2 · CH4 · C6H6 · etc
The Initial
Vaccum Degree
~10-6Torr
Bias Power 13.56 MHz [RF]
Device Operation Automatic / Semi-automatic
Cooling System Water cooled

 

Advantages of CARBOZEN™-C

• Enable to form a of high purity coating layer
• Possivle to form various coating layers by source gas
• High deposition rate and uniformity ro large-areas
• Easy to control and possible mass production
• Lowtemperature for ion plating

 

Applications

 

Plane-DLC

ight guide plates, CD molds and Coin Heads for specular display components.      

J&L Tech CARBOZEN™-C

 

Inner DLC

Compressor parts for refrigerators and chemical plant pipes

J&L Tech CARBOZEN™-C  1

Download

Advanced Hybrid Coating System

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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