CARBOZEN-M Series prolongs product's life expectancy and facilitates large size coating.
|챔버 크기||Ø1000×L3000mm, Custom-made|
|증착률||0.5㎛ / Hr|
|플라즈마 소스||Linear Ion Source, UBM Sputter|
• Operating expeditious etching through Cleaning process using Linear Ion Source.
• UBM Sputter’s outstanding performance of Multi-Buffer layer deposition.
• Minimizing edge effect by electrode structure design.
• Guaranteeing safety for conveyance and consisting with rail of CVD door system for convenience of maintenance
Large size of Gravure Roller
▶ Extending life expectancy by improving high-hardness and abrasion resistance.
▶ Inducing repulsion between electronic ink and printer roller (Advancement: printing speed and resolution)
▶ Improving the quality and reliability of products.