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EUGENE TECH

EUGENE TECH

Dry Cleaning System

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Origin

Korea (Republic of)


Description

The Hawk™ is a dry cleaning system for memory and logic device which provides a perfectly clean Si surface for deep contact plug integration and all of the Epi processes including Si, SiGe and III-V materials. 

 

Key Features

- Single Wafer Dry Cleaning Process with Gas Chemicals

- Eugene's Own Dual Rotated Spiral ICP Antenna Plasma Source

- High Radical Density

- Plasma Damage Free

- Wide Range of Process Parameters


Benefits

- Controllable Map, Concave or Convex

- Excellent Uniformity

- Good Coverage at Deep Contact

- High Throughput


Applications

EUGENE TECH Dry Cleaning System Hawk™

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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