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EUGENE TECH

EUGENE TECH

EUGENE TECH

EUGENE TECH

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EUGENE TECH

EUGENE TECH

Dry Cleaning System

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Description

The Hawk™ is a dry cleaning system for memory and logic device which provides a perfectly clean Si surface for deep contact plug integration and all of the Epi processes including Si, SiGe and III-V materials. 

 

Key Features

- Single Wafer Dry Cleaning Process with Gas Chemicals

- Eugene's Own Dual Rotated Spiral ICP Antenna Plasma Source

- High Radical Density

- Plasma Damage Free

- Wide Range of Process Parameters


Benefits

- Controllable Map, Concave or Convex

- Excellent Uniformity

- Good Coverage at Deep Contact

- High Throughput


Applications

EUGENE TECH Dry Cleaning System Hawk™

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.