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Canisters
Model Name
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Data
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Manufacturer information
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CN1

Semi conductor and Hi tech equipment manufacturer, ALD, Coating solution

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Manufacturer
CN1
Product Type
Machine
Brand
-
SKU
52986
Product Name
Canisters
Model Name
-
Size
-
Weight
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Product Details

Canisters

CN1 supplies various types of canister which contains liquid chemicals for ALD- and CVD-related processes in semiconductor-based industries

 

Product information

CN1 Canisters

Product type

Feature & Advantages

ㆍVolume : 1~200 liter

ㆍ316L stainless body with EP treatment

ㆍMaximum safety and cost efficient

ㆍHydraulic pressure : 300kPa

ㆍLeak rate : under 2.0×10-9 mbar·l/sec

 

19 liter DLI Canister

 

CN1 Canisters  1

Class

Specification

Transfer type

DLI(Direct Liquid Injector) for LDS

Valve type

1/4″ Pneumatic diaphragm valve

Gasket

Teflon or Metal

Inlet/Outlet port

1/4″ Male VCR

Refill port

1/4″ or 1/2″ Male VCR

Purge valve

Option

Level sensor

Option

 

CN1
Semi conductor and Hi tech equipment manufacturer, ALD, Coating solution
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