Canisters
CN1 supplies various types of canister which contains liquid chemicals for ALD- and CVD-related processes in semiconductor-based industries
Product information

Product type
Feature & Advantages
ㆍVolume : 1~200 liter
ㆍ316L stainless body with EP treatment
ㆍMaximum safety and cost efficient
ㆍHydraulic pressure : 300kPa
ㆍLeak rate : under 2.0×10-9 mbar·l/sec
19 liter DLI Canister

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Class
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Specification
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Transfer type
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DLI(Direct Liquid Injector) for LDS
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Valve type
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1/4″ Pneumatic diaphragm valve
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Gasket
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Teflon or Metal
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Inlet/Outlet port
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1/4″ Male VCR
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Refill port
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1/4″ or 1/2″ Male VCR
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Purge valve
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Option
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Level sensor
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Option
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