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CN1
Manufacturer information
CN1
Semi conductor and Hi tech equipment manufacturer, ALD, Coating solution
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Manufacturer
CN1
Product Type
Machine
Brand
-
SKU
52983
Product Name
Atomic-Basic
Model Name
-
Size
-
Weight
-
Product Details
Compact reactor Thermal ALD
ㆍCompact ALD Model
ㆍThermal ALD
ㆍWafer Size : ≤ 6″ Wafer
ㆍProcess temperature : up to 250°C
ㆍApplications : Oxide Film(Al2O3), etc
ㆍVery small Volume for process
