Rotating reactor ALD for shell coating on core structure

ㆍNano size powder coating system

ㆍReactor volume : > 100cc

ㆍFilter size : Variable(from 0.5µm~)

ㆍHorizontal rotation system

ㆍPrecursor canister : 4EA

ㆍProcess temperature : R.T. ~ 350°C (Reactor body : 230°C)

ㆍReactor rotation : DC Motor

ㆍRotation speed : 10 ~ 120rpm

ㆍBase pressure : under 20mTorr

ㆍApplication : Coating on particle, wire, tube, etc.