This product is manufactured by
CN1
Manufacturer information
CN1
Semi conductor and Hi tech equipment manufacturer, ALD, Coating solution
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Manufacturer
CN1
Product Type
Machine
Brand
-
SKU
52980
Product Name
Atomic-Classic
Model Name
-
Size
-
Weight
-
Product Details
Traveling wave type ALD
ㆍTraveling wave type thermal ALD
ㆍLaminar gas flow (Side gas flow)
ㆍVariable gas delivery system : Bubbler, LDS
ㆍLow particle generation
ㆍVery small volume for process
ㆍAvailable laminated & mixed process
ㆍProcess temperature : up to 450°C
ㆍPrecursor canister : 4EA(standard)
ㆍSubstrate size :
4 ~ 8” wafer
2G : 370x470mm glass
ㆍApplications
Dielectric thin films : Al2O3, HfO2, ZrO2, TiO2, ZnO2, STO, ZnS, Laminate films, etc.
