

반도체장비 및 진공장비 전문업체, VACUUM 시스템, 태양전지
Overview
가속기 저장링에서 방출된 광원으로부터 단색광의 파장을 선택하기 위한 장치.DCM보다 100배 밝은 빛을 이끌어낸다.
Specifications
| PART | FUNCTION | ACTUATOR / MONITOR | RANGE | RESOLUTION | 
| 1st Crystal | Bragg Angle | Goniometer | 360° | 0.18″ | 
| Angle Encoder | 360° | 0.1″ | ||
| 2nd Crystal | Pitch | Goniometer | 360° | 0.18″ | 
| Angle Encoder | 360° | 0.1″ | ||
| Roll | Pico-motor | ±0.63° | 0.00001″ | |
| Z2 | Linear Stage | ±25mm | 1µm | |
| Linear Encoder | ±25mm | 0.5µm | ||
| Longitudinal | Stepper Motor, Rack and Pinion | ±500mm | 1µm | |
| Linear Encoder | ±500mm | 0.5µm | ||
| Chamber (include 1st and 2nd crystal) | Lateral | Stepper Motor, Screw Jack | ±50mm | 33nm | 
| Linear Encoder | ±50mm | 0.5µm | ||
| Vertical | Stepper Motor, Screw Jack | ±6.537mm | 2.88nm | |
| Linear Encoder | ±75mm | 0.5µm | ||
| Whole System | DMM Pitch | Stepper Motor, Screw Jack | ±0.88° | 0.001″ | 
| DMM Roll | Stepper Motor, Screw Jack | ±2.86° | 0.0034″ | |
| DMM Height | Stepper Motor, Screw Jack | ±25mm | 4.17nm | |
| Linear Encoder | ±25mm | 0.5µm | ||
| DMM Yaw | Set-screw M20 - 100mm | ≈ ±2.5° | - | |
| DMM Lateral | ±30mm | - | ||
| DMM Longitudinal | ±30mm | - | ||
| Temperature | Silicon Diode, Platinum Sensor | 1K ~ 425K | - | |
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