Description

Fine Stepping Piezo Actuator (FSPA35XS) is a patented actuator that combines SPA technology with mechanical reduction. Step sizes lower than 100nm are achievable in fine displacement. Typical max speed for this FSPA is 200 um/s.

Performances

Actuation force: >100N; Travel range: 5mm; Typical lifetime: 100 cycles

Available options

Micro/Nano positioning, locking mechanism

Status

Preliminary