스마트 액추에이터, 스마트 센서, 메카트로닉 시스템, 디텍션 시스템 등
Description
The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection
Performances
Max no load displacement (µm): 200; Dimensions (mm): 100*100*49; Resolution (nm): 20; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32
Available options
Strain Gauges; Eddy Current Sensors, Vacuum
Status
Standard