스마트 액추에이터, 스마트 센서, 메카트로닉 시스템, 디텍션 시스템 등
Description
The piezoelectric stage X60S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performances
Max No-load displacement(µm):55; Dimensions (mm):30*30*12; Unloaded resonance frequency(Hz): 1840; Response time: 0.27
Available options
Strain gauges, Vacuum
Status
Preliminary