Reticle Macro Inspection 

▪ Particle inspection on all area of reticle : 

   - Pellicle, Pellicle Frame, Pattern, Backside

▪ Multi scanning with vertical and oblique optical system

▪ Inspection of various reticles with 1 recipe 

   - No prior work for each mask needed

▪ Applicable to full automation

▪ 0.5um pinhole/particle detection in non-pattern area

▪ Optional function to distinguish particle position at top/bottom of pellicle

▪ Verifying review module included