▪ LED Chip process Monitoring & Inspection

▪ Using Linescan camera, High Speed / High Precision inspection is available.

▪ Available for Large Chip, Vertical Type Chip and Pieces of Wafer. 

▪ Inspection Item
    - Pad defect, Epitaxial Defect, Finger defect, ITO defect, 
    - Mesa Line, Double chip, etc.