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Product Name Burn-Wet
Model PCS-BW400S
Series Scrubber
Catalog
Product Description

System that processes toxic gas generated from semiconductor manufacturing process using direct flame treatment through LNG combustion 

Periodic PM cycle extension using scraper system

Safety certification via safety authentication design

ITEM

SPECIFICATION

Dimension(W x D x H)

720mm x 850mm x 1680mm

Power

208 VAC, 3 Phase, 3A

Capacity

400 SLM

Utilities

LNG, O2, CW, PCW, CDA, N2

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