System that processes toxic gas generated from semiconductor manufacturing process using direct flame treatment through LNG combustion
Periodic PM cycle extension using scraper system
Safety certification via safety authentication design
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ITEM
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SPECIFICATION
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Dimension(W x D x H)
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720mm x 850mm x 1680mm
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Power
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208 VAC, 3 Phase, 3A
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Capacity
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400 SLM
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Utilities
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LNG, O2, CW, PCW, CDA, N2
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