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Plasma-Wet
Model Name
PCS-PW400S
Series
Scrubber
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Data
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Manufacturer information
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PTC

Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more

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Manufacturer
PTC
Product Type
Machine
Brand
-
SKU
31460
Product Name
Plasma-Wet
Model Name
PCS-PW400S
Size
-
Weight
-
Product Details

System that decomposes the target gas generated from the semiconductor manufacturing process using extreme high temperature JET using PLASMA

High decomposition efficiency of PFC GAS (99%)

ITEM

SPECIFICATION

Dimension(W x D x H)

720mm x 850mm x 1680mm

Power

208 VAC, 3 Phase, 3A

Capacity

300 SLM

Utilities

LNG, O2, CW, PCW, CDA, N2
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PTC
PTC
Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
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