Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
System that removes waste gas generated from semiconductor manufacturing process using resin components and through physical and chemical adsorption below TLV value and purifies the gas and changes it into non-hazardous gas.
Efficient target gas adsorption using resin
CW unused (save UT)
ITEM
SPECIFICATION
Dimension(W x D x H)
740mm x 750mm x 1600mm
Power
100~220 VAC, One Phase, 50~60Hz, 3A
Capacity
200 SLM
Utilities
N2