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THC
Model Name
IRS-8000PV
Series
Test Chamber
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Data
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Manufacturer information
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PTC

Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more

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Manufacturer
PTC
Product Type
Machine
Brand
-
SKU
31462
Product Name
THC
Model Name
IRS-8000PV
Size
-
Weight
-
Product Details

Precision temperature and humidity control system of semiconductor photo process track facility

Low electricity energy saving system

Production based on optimized design (stability and operational convenience)

ITEM

SPECIFICATION

TEMPERATURE CONTROL RANGE

THC : 20 ~ 25℃ (±0.05 ℃)
TCU : 20 ~ 25℃ (±0.05 ℃)

HUMIDITY CONTROL RANGE

THC : 40 ~ 45% (±0.25%)

FLOW RATE

88.5 ℓ/min

WIND SPEED

61㎥/min

 

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PTC
PTC
Semiconductor equipment, Chiller, Heat exchanger, THC, Gas scrubber and more
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