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All Teflon(POCL3)
Model Name
-
Series
Throttle Valve
Data
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Manufacturer information
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ATOVACMFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller
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Manufacturer
ATOVAC
Brand
-
SKU
129718
Product Name
All Teflon(POCL3)
Model Name
-
Size
-
Weight
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Product Details

ATV1000 All Teflon Throttle Valve

ATV1000 All Teflon Throttle Valve 는 진공 Chamber의 압력을 조절하는데 사용된다. 

ATV1000 All Teflon (Throttle Valve)는 GPC3000 (Auto Pressure Controller)와 호환하여 사용 하도록 설계 되어 있다.

특히 포클(POCL) 액인 것을 특징으로 하는 반도체 공정 제조 장비의 배출 장치로 많이 사용 된다. 


 


Features & Benefits

■ ATV1000 All Teflon (Throttle Valve)는 Micro-Stepping Motor 및 Direct Gear Driver를 사용하여 Valve 의 Resolution을 향상시켰고, 반 영구적으로 사용이 가능하다.

■ ATV1000 All Teflon (Throttle Valve)는 귀사에서 제공하는 GPC3000 Controller와 연결하여 사용이 가능하며, 기타 타 회사 제품의 Controller도 연결하여 사용할수 있다.

■ ATV1000 All Teflon (Throttle Valve)는 Teflon 재질로 되어 있어 오염으로부터 특화 되어있다. 




Specifications

Speed (open to close)

2.0 sec 

Resolution

1/24000 

Drive Method

Direct gear drive 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

PTFE, PEEK, Viton

Compatible Controller

Model GPC3000

MKS Type 651, 1651 

Size

i inch Teflon join 

Full Closed Leak (100mmH2O)

 3 l/min



 

ATOVACMFC Contorller, Convection Gauge & Controller, lon Gauge & Controller, Capacitance Manometer, Throttle Valve Controller
Since our founding, we have been developing sensors and instrumentation for gas and vacuum control, which are at the heart of the semiconductor production process. Almost all products in the semiconductor market are foreign-made. Our products are cheaper than their foreign counterparts, and Atovac focuses on developing products with high performance. The products we develop are MFC, MFC Controller, Convection Gauge and Controller, Lon Gauge and Controller, Capacitance Manometer, Throttle Valve Controller, and other major components and sensors for vacuum equipment. We look forward to your continued interest and affectionate support for ATOVAC, a company that springs new ideas and creates a corporate culture that is always energized.
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