Overview
- Summary
- A company specializing in the development of sensors and measurement devices for gas and vacuum control, critical components in semiconductor manufacturing processes. It offers a comprehensive range of vacuum technology products, including Mass Flow Controllers (MFCs), Vacuum Gauges, Throttle Valves, and their respective controllers. The company focuses on developing products with superior performance and competitive pricing compared to foreign counterparts.A company specializing in the development of sensors and measurement devices for gas and vacuum control, critical components in semiconductor manufacturing processes. It offers a comprehensive range of vacuum technology products, including Mass Flow Controllers (MFCs), Vacuum Gauges, Throttle Valves, and their respective controllers. The company focuses on developing products with superior performance and competitive pricing compared to foreign counterparts.
- Key Products/Technologies
- Mass Flow Controllers (MFCs) and Controllers: AFC500/AFC600 (ranges from 10 SCCM to 50 SLM, ±1% F.S. accuracy, fast warm-up time), AFC770 HIGH MASS FLOW CONTROLLER (ranges from 51 SLM to 500 SLM, ±1% F.S. accuracy). Gas flow control systems such as MFC Box Panel & Gas Flow System, MFC Control Box, and AMCB (2-6 channel MFC control box units).Mass Flow Controllers (MFCs) and Controllers: AFC500/AFC600 (ranges from 10 SCCM to 50 SLM, ±1% F.S. accuracy, fast warm-up time), AFC770 HIGH MASS FLOW CONTROLLER (ranges from 51 SLM to 500 SLM, ±1% F.S. accuracy). Gas flow control systems such as MFC Box Panel & Gas Flow System, MFC Control Box, and AMCB (2-6 channel MFC control box units).
- Vacuum Gauges and Controllers: ION Gauge [4336K], Convection Gauge [CG202], Enhanced Convection Gauge [EG301]. GVC2200 Vacuum Gauge Controller (simultaneous connection of Hot Cathode Ionization Gauge, Convection Gauge, and Capacitance Manometer, measuring range from 10-9 Torr to 1000 Torr). Capacitance Manometer (1, 2, 10, 100, 1000 Full Scale).Vacuum Gauges and Controllers: ION Gauge [4336K], Convection Gauge [CG202], Enhanced Convection Gauge [EG301]. GVC2200 Vacuum Gauge Controller (simultaneous connection of Hot Cathode Ionization Gauge, Convection Gauge, and Capacitance Manometer, measuring range from 10-9 Torr to 1000 Torr). Capacitance Manometer (1, 2, 10, 100, 1000 Full Scale).
- Throttle Valves and Controllers: ATV1000-B, ATV1000, ATV3000 Smart Exhaust Pressure Controller. GPC3000 [Throttle Valve Controller] (powers Capacitance Manometers, receives pressure signals, and controls throttle valves using PID or Self-Tuning functions). APC200 [Throttle Valve Controller] (an upgraded version of GPC3000 with optional MFC connectivity).Throttle Valves and Controllers: ATV1000-B, ATV1000, ATV3000 Smart Exhaust Pressure Controller. GPC3000 [Throttle Valve Controller] (powers Capacitance Manometers, receives pressure signals, and controls throttle valves using PID or Self-Tuning functions). APC200 [Throttle Valve Controller] (an upgraded version of GPC3000 with optional MFC connectivity).
- Integrated Controllers and Power Supply Units: GVC2200 Vacuum Gauge Controller, CG2000 [Vacuum Gauge Controller]. AMC60 [P/S & Flow controller], GMC300D [P/S & Flow Controller] (discontinued, replaceable by ATC050, ATC100). GMC220 [Power Supply & Readout Unit] (discontinued, replaceable by ATC050, ATC100). GMC1200 [Flow & Pressure Controller] (provides power to MFCs, displays flow rates, supports Capacitance Manometer pressure display, and offers optional Upstream Pressure Control).Integrated Controllers and Power Supply Units: GVC2200 Vacuum Gauge Controller, CG2000 [Vacuum Gauge Controller]. AMC60 [P/S & Flow controller], GMC300D [P/S & Flow Controller] (discontinued, replaceable by ATC050, ATC100). GMC220 [Power Supply & Readout Unit] (discontinued, replaceable by ATC050, ATC100). GMC1200 [Flow & Pressure Controller] (provides power to MFCs, displays flow rates, supports Capacitance Manometer pressure display, and offers optional Upstream Pressure Control).
- Other Systems: Gas Line System, and All Teflon(POCL3) product lines.Other Systems: Gas Line System, and All Teflon(POCL3) product lines.
- Core Advantages
- Specialized technological expertise in gas and vacuum control, crucial for semiconductor manufacturing processes.Specialized technological expertise in gas and vacuum control, crucial for semiconductor manufacturing processes.
- Capability to develop products offering both competitive pricing and superior performance compared to international alternatives.Capability to develop products offering both competitive pricing and superior performance compared to international alternatives.
- Extensive product portfolio including MFCs, vacuum gauges, throttle valves, and integrated controllers for comprehensive vacuum equipment solutions.Extensive product portfolio including MFCs, vacuum gauges, throttle valves, and integrated controllers for comprehensive vacuum equipment solutions.
- High flexibility and space efficiency through modular design and custom-made control boxes.High flexibility and space efficiency through modular design and custom-made control boxes.
- Wide measurement range from ultra-high vacuum to atmospheric pressure and multi-gauge simultaneous connection capabilities of vacuum gauge controllers like GVC2200.Wide measurement range from ultra-high vacuum to atmospheric pressure and multi-gauge simultaneous connection capabilities of vacuum gauge controllers like GVC2200.
- Precise flow control, fast warm-up times, and high accuracy of AFC500/AFC600 and AFC770 Mass Flow Controllers.Precise flow control, fast warm-up times, and high accuracy of AFC500/AFC600 and AFC770 Mass Flow Controllers.
- Adoption of high-speed microprocessors and PC control via RS-232C interface for advanced operational capabilities.Adoption of high-speed microprocessors and PC control via RS-232C interface for advanced operational capabilities.
- Target Industrie
- Semiconductor manufacturing processesSemiconductor manufacturing processes
- Vacuum equipment industryVacuum equipment industry
- General industrial gas flow and pressure control applicationsGeneral industrial gas flow and pressure control applications
- Major Markets
- ChinaChina
- Certifications/Patents
- ISO 9001:2015 Quality Management System certification.ISO 9001:2015 Quality Management System certification.
- CE certifications for various products, including APC200, CG202, CG2000, AFC500, ATV1000, GPC3000, GMC1200, and GVC2200.CE certifications for various products, including APC200, CG202, CG2000, AFC500, ATV1000, GPC3000, GMC1200, and GVC2200.
- Proprietary technology in the development of core sensors and measurement devices for vacuum and gas control.Proprietary technology in the development of core sensors and measurement devices for vacuum and gas control.
- Expertise in developing key vacuum equipment components and sensors such as MFCs, vacuum gauges, and throttle valves.Expertise in developing key vacuum equipment components and sensors such as MFCs, vacuum gauges, and throttle valves.
Introduction
Key Products
Location
63-4 Jungbu-daero 1758beon-gil, Cheoin-gu, Yongin-si, Gyeonggi-do, South Korea
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