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ATOVAC

ATOVAC

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ATOVAC

ATOVAC

Mass Flow Controller

Model

Series

MFC


Transaction Process

Please contact Komachine.

Payment

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Delivery

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Shipment

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Origin

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Description

AFC500/AFC600 MASS FLOW CONTROLLER

MFC는 Mass Flow Controller의 약자로서 Gas Bottle에서 나오는 Gas를 유저가 원하는 일정한 유량의 값으로 흐르게 하기 위한 장치입니다. 단위로는 제조회사마다 약간의 차이를 보이지만 일반적으로 SCCM(Standard Cubic Centimeter per Minutes)을 사용합니다.


 


Features & Benefits

■ AFC500/AFC600 (Mass Flow Controller)는 일반적으로 산업용을 포함하여 반도체고정에도 사용할수 있도록 설계되어 있습니다.

■ AFC500/AFC600 (Mass Flow Controller)는 Full Scale Range 는 5 SCCM ~ 50 SLM 입니다.

■ AFC500/AFC600 (Mass Flow Controller)는 Full Scale 1%에 해당하는 오차를 가지고 있습니다.

■ AFC500/AFC600 (Mass Flow Controller)는 Warm-up 시간이 거이 필요하지 않는 제품으로 설계되어 있습니다.

■ AFC500/AFC600 (Mass Flow Controller)는 기본적으로 9Pin D-sub Connector를 사용합니다.

■ AFC500/AFC600 (Mass Flow Controller)는 GMC1200과 같은 MFC Power Supply & Display Unit와  함께 사용할 수 있습니다. 




Dimensions




Fitting

"A" Dimmention (mm)

VCR

LOK

1/4"

123.8

112.8

3/8"

127.4

130.8

1/2"

128.8

130.8






Specifications

Full S cale Ranges (N2 equivalent)

10 SCCM ~ 50 SLM

Maximum lnlet P ressure

150 psig

Normal Operating Pressure  Differential

(with atmospheric pressure at the. MFCoutlet)

10 to 5000 sccm

10000 to 20000 sccm

 

 

10 to 40 psid

15 to 40 psid

Control Range

2% to 100% of F.S 

Accuracy (analog)

(including non-linearity, hysteresis,

and non-repeata bility referenced to 760mmhg and 0°c)

±1.0% of F.S

 

 

 

Repeatability

±0.2% of F.S

Resolution

1.0% of F.S 

Temperature Coefficients

Zero

Span

<0.05 % of F.S./°C

<0.05 % of F.S.

Warm-up Time (to within 0.2% of F.S. of steady state performance)

< 2 min

Controller Settling Time

< 2 sec

Pressure Coefficient

<0.02 % of Rdg./psi

Normal Operating Temperature Range

0°C to 50°C 

Input Voltage Required

Max. current at start-up (first 2 sec)

Typical current at seady state

 

±15 VDC(±5%) @ 200 mA

+15 ~ 24 VDC(±5%) @ 300 mA (Option)

Set Point Command Signal

0 to 5 VDC (Option 4~20 mA)

Output Signal

0 to 5 VDC (Option 4~20 mA)

Connector Types Analog

9-pin "D" Type 

 REMOTE MODERS485, RS232 

Wetted Materials

Stan dard Optional

(seals and valve seat)

316L S.S. , Vition , Kalrez(AFC600)

Leak Integrity    External (scc/sec He)

                          Through closed valve

<1 x 10(-9)

<1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.)

Fittings (compatible with)

Swagelok 4 VCR, 1/4" Swagelok

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

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