반도체장비 및 진공장비 전문업체, VACUUM 시스템, 태양전지
SPECIFICATIONS
Model No. | MLS-V1 |
Table size (mm) | 320*200 (mm) |
Motion range (mm) | 1200 (mm) |
Resolution (µm) | 1 (Half Step) |
Accuracy (µm) | 5 |
Repeatability (µm) | 10 |
Load capacity | 20kgf |
Guide mechanism | LM Guide |
Lead mechanism | Ball Screw,Lead 10mm |
Material | Granite Palte |