구조 및 원리
- 오일증기가 아래쪽을 향하여 분사되어 배기되는 가스 분자가 분사류속으로 확산하여 분사류 방향으로 압축되어 배기된다.
- 펌프용기, 확산펌프오일, 오일을 가열 증발시키는 보일러 열원인 히터, 증발된 오일을 분사시미는 젯트로 구성, 펌프용기에 오일증기를 응축시켜 액체로 되돌리기 위한 수냉관이 감겨져 있다.
- 펌프용기 아래쪽벽에 압축된 가스분자를 후단의 오일 회전 펌프로 보내기 위해 배기구를 설치한다.
- 펌프용기는 항아리 타입과 원통형으로 제작되는 것이 보통이며 재질은 스텐레스를 주로 사용하며 COLD TRAP을 흡입구측에 설치하면 더 높은 진공도를 얻을 수 있다.
모 델 | WSDP-4 | WSDP-8 | WSDP-10 | WSDP-15 | WSDP-18 | WSDP-22 | WSDP-28 | 특 징 |
배기속도[l/sec] | 600 | 2000 | 3000 | 5000 | 9000 | 12000 | 25000 | -보수점검 용이 -빠른 배기속도 -Body:SUS304 |
도달압력[Torr] | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | |
임계배압[Toor] | 0.2 | 0.2 | 0.2 | 0.25 | 0.25 | 0.3 | 0.3 | |
흡 입 구[inch] | 4 | 8 | 10 | 15 | 18 | 22 | 28 | |
배 기 구[inch] | 1 | 1 1/2 | 2 | 2 1/2 | 4 | 6 | 6 | |
소요전력[kW] | 0.7 | 2 | 3 | 6 | 5.4(6.5) | 6(8) | 9(13) | |
펌프오일[l] | 0.2 | 0.5 | 0.9 | 1.5 | 3 | 5 | 8 | |
냉각수량[l/min] | 1.5 | 2.5 | 5 | 8 | 10 | 12 | 15 | |
예열시간[min] | 15 | 20 | 22 | 25 | 30 | 35 | 40 |
▶ F100/110, F100/110T, F100/110N Turbomolecular Pumps
| Type | F100/110 | F100/110T | FX100/110D | ||||
| UHV Flange | DN100LF | DN100CF | DN100LF | DN100CF | DN100LF | DN100CF | |
| Order No. | |||||||
| Pumping Speed (L/s) | 110 | 110 | 110 | ||||
| Compression Ratio | N2: | >108 | >108 | >108 | |||
| H2: | 5x102 | 5x102 | 5x102 | ||||
| Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
| 6x10-6 | 6x10-6 | 6x10-6 | |||||
| 6x10-7 | 6x10-7 | 6x10-7 | |||||
| Output Flange | KF25 | KF25 | KF25 | ||||
| Bearing | Metal Ball Bearings | Ceramic Ball Bearing | |||||
| Start-up Time(min) | <2 | <2 | <2 | ||||
| Rotational Speed(rpm) | 42300 | 42300 | 42300 | ||||
| Cooling Rquirements | Water&Air | Water&Air | Water&Air | ||||
| Operating Position | Vertical Or Horizonal | Vertical Or Horizonal | Vertical Or Horizonal | ||||
| Weight(Kg) | 8 | 8 | 8 | ||||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||||
▶ F100/110, F100/110T, F100/110N Turbomolecular Pumps
| Type | F160/450 | F160/450T | F160/450N | ||||
| UHV Flange | DN160LF | DN150CF | DN160LF | DN150CF | DN160LF | DN150CF | |
| Order No. | |||||||
| Pumping Speed (L/s) | 450 | 450 | 450 | ||||
| Compression Ratio | N2: | >108 | >108 | >108 | |||
| H2: | 103 | 103 | 103 | ||||
| Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
| 6x10-6 | 6x10-6 | 6x10-6 | |||||
| 6x10-7 | 6x10-7 | 6x10-7 | |||||
| Output Flange | KF40 | KF40 | KF40 | ||||
| Bearing | Metal Ball Bearings | Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
| Start-up Time(min) | <5 | <5 | <5 | ||||
| Rotational Speed(rpm) | 24000 | 24000 | 24000 | ||||
| Cooling Rquirements | Water | Water | Water | ||||
| Operating Position | Vertical ±5° | Vertical ±5° | Vertical ±5° | ||||
| Weight(Kg) | 30 | 30 | 30 | ||||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||||
▶ F160/450, F160/450T, F160/450N Turbomolecular Pumps
| Type | F160/620 | F160/620Z | F160/620N | ||||
| UHV Flange | DN160LF | DN150CF | DN160LF | DN150CF | DN160LF | DN150CF | |
| Order No. | |||||||
| Pumping Speed (L/s) | 600 | 600 | 600 | ||||
| Compression Ratio | N2: | >109 | >109 | >109 | |||
| H2: | 6x103 | 6x103 | 6x103 | ||||
| >Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
| 6x10-6 | 6x10-6 | 6x10-6 | |||||
| 6x10-7 | 6x10-7 | 6x10-7 | |||||
| Output Flange | KF40 | KF40 | KF40 | ||||
| Bearing | Metal Ball Bearings | Grease Lubricate Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
| Start-up Time(min) | <5 | <5 | <5 | ||||
| Rotational Speed(rpm) | 24000 | 24000 | 24000 | ||||
| Cooling Rquirements | Water | Water | Water | ||||
| Operating Position | Vertical ±5° | Any Direction | Vertical ±5° | ||||
| Weight(Kg) | 32 | 32 | 32 | ||||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||||
▶ F160/620, FF160/620Z, FF160/620N Compound Molecular Pumps
| Type | FF160/800 | FF160/800Z | FF160/800N | ||||
| UHV Flange | DN160LF | DN150CF | DN160LF | DN150CF | DN160LF | DN150CF | |
| Order No. | |||||||
| Pumping Speed (L/s) | 800 | 800 | 800 | ||||
| Compression Ratio | N2: | >109 | >109 | >109 | |||
| H2: | 6x103 | 6x103 | 6x103 | ||||
| Ultimate Vacuum(Pa)> | 6x10-8* | 6x10-8* | 6x10-8* | ||||
| 6x10-6 | 6x10-6 | 6x10-6 | |||||
| 6x10-7 | 6x10-7 | 6x10-7 | |||||
| Output Flange | KF40 | KF40 | KF40 | ||||
| Bearing | Metal Ball Bearings | Grease Lubricate Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
| Start-up Time(min) | <5 | <5 | <5 | ||||
| Rotational Speed(rpm) | 27000 | 27000 | 27000 | ||||
| Cooling Rquirements | Water | Water | Water | ||||
| Operating Position | Vertical ±5° | Any Direction | Vertical ±5° | ||||
| Weight(Kg) | 35 | 35 | 35 | ||||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||||
▶ FF160/800, FF160/800T, FF160/800N Compound Molecular Pumps
| Type | FF200/1200 | FF200/1200Z | FF200/1200N | ||||
| UHV Flange | DN200LF | DN200CF | DN200LF | DN200CF | DN200LF | DN200CF | |
| Order No. | |||||||
| Pumping Speed (L/s) | 1200 | 1200 | 1200 | ||||
| Compression Ratio | N2: | >109 | >109 | >109 | |||
| H2: | 6x103 | 6x103 | 6x103 | ||||
| Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
| 6x10-6 | 6x10-6 | 6x10-6 | |||||
| 6x10-7 | 6x10-7 | 6x10-7 | |||||
| Output Flange | KF40 | KF40 | KF40 | ||||
| Bearing | Metal Ball Bearings | Grease Lubricate Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
| Start-up Time(min) | <5 | <5 | <5 | ||||
| Rotational Speed(rpm) | 24000 | 24000 | 24000 | ||||
| Cooling Rquirements | Water | Water | Water | ||||
| Operating Position | Vertical ±5° | Any Direction | Vertical ±5° | ||||
| Weight(Kg) | 45 | 45 | 45 | ||||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||||
▶ FF200/1200, FF200/1200T, FF200/1200N Compound Molecular Pumps
| Type | F250/1500 | F250/1500T | F250/1500N | ||||
| UHV Flange | DN250LF | DN250CF | DN250LF | DN250CF | DN250LF | DN250CF | |
| Order No. | |||||||
| Pumping Speed (L/s) | 1500 | 1500 | 1500 | ||||
| Compression Ratio | N2: | >108 | >108 | >108 | |||
| H2: | 5x102 | 5x102 | 5x102 | ||||
| Ultimate Vacuum(Pa) | 6x10-8* | 6x10-8* | 6x10-8* | ||||
| 6x10-6 | 6x10-6 | 6x10-6 | |||||
| 6x10-7 | 6x10-7 | 6x10-7 | |||||
| Output Flange | KF50 | KF50 | KF50 | ||||
| Bearing | Metal Ball Bearings | Ceramic Ball Bearing | Ceramic Ball Bearing | ||||
| Start-up Time(min) | <8 | <8 | <8 | ||||
| Rotational Speed(rpm) | 21000 | 21000 | 21000 | ||||
| Cooling Rquirements | Water | Water | Water | ||||
| Operating Position | Vertical ±5° | Vertical ±5° | Vertical ±5° | ||||
| Weight(Kg) | 60 | 60 | 60 | ||||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||||
▶ F250/1500, F250/1500T, F250/1500N Turbomolecular Pumps
| Type | F400/3500 | F400/3500T | |||
| UHV Flange | DN400LF | DN400LF | |||
| Order No. | |||||
| Pumping Speed (L/s) | 3500 | 3500 | |||
| Compression Ratio | N2: | >108 | >108 | ||
| H2: | 5x102 | 5x102 | |||
| Ultimate Vacuum(Pa) | 6x10-6 | 6x10-7* | 6x10-6 | 6x10-7* | |
| Output Flange | LF100 | LF100 | |||
| Bearing | Ceramic Ball Bearing | Ceramic Ball Bearing | |||
| Start-up Time(min) | <35 | <35 | |||
| Rotational Speed(rpm) | 13500 | 13500 | |||
| Cooling Rquirements | Water | Water | |||
| Operating Position | Vertical ±5° | Vertical ±5° | |||
| Weight(Kg) | 90 | 90 | |||
| * to acquired the parameter, its backing pump are vane pump + oil diffusion pump. | |||||
