



Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC
Products Detail
- Laser, Power supply, X-Y-Z-R stage,
- Vision system, System control S/W
Products Introduction
| Model | LPS-DF250 |
| Wavelength | 266 nm |
| Pulse repetition rate | Single shot to 100㎑ |
| Power | ≥ 3W @30kHz |
| Pulse stability | < 5 % rms up to 30kHz |
| Beam divergence | < 0.3 mrad |
| Cooling | Closed loop |
| Demension | 1600mm(W) x 1500mm(L) x 1700mm(H) |
| Weight | 1500kg |
| Electricity | 220V, 3PH |
| Vision | FOV : 1.4 x 1.9 (mm) |
- High precision optics and optimized processing system
- Si Sapphire scribing
- Scribing broken wafer
- Alignment by X-Y-Z-R stages and vision
- applied to dxf file















