



Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC
Products Detail
- KrF (ArF) Excimer Laser
- High precision optics, X-Y-Z stage
Products Introduction
| Model | LPD-EK500 |
| Laser type | KrF (ArF) |
| Wave length | 248 mm (193 nm) |
| Average power | 10 W |
| Pulse energy | 10 mJ @ 1000 Hz |
| Pulse width | 10 ~ 25 nsec |
| Pulse stability | ±3 % |
| Cooling | water |
| X-Y stroke | 500 mm x 500 mm |
| Accuracy | ±4 ㎛ |
| Repeatability | ±2 ㎛ |
| Dimension | 1750 mm(W) x 1500 mm(D) x 1850 mm(H) |
- High precision micro processing system by excimer laser
- High power stability by new gas circulation system
- User friendly GUI with touch screen
- Drilling, Patterning etc















