



Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC
Products Detail
- Excimer laser micro machining system
Products Introduction
| Model | LPS-EKF100 |
| Laser type | KrF |
| Wave lenght | 248 mm |
| Pulse repetition rate | < 200 Hz |
| Average energy | < 100mJ |
| Power stability | 5 % |
| Warming up | 30 min. |
| Gas lifetime | 20 x 10e6 pulses |
| Beam dimension | 10 x 20 ㎟ |
| Beam divergence | 3 x 10 mrad |
| Laser tube lifetime | 1 x 10e8 pulses |
| Cooling | water |
- Micro machine by excimer laser
- High power stability by new gas circulation system
- User friendly GUI with touch screen
- Precision machining of polymers, metal films
- Stripping of wires
- Surface cleaning
- Drilling via hole















