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Excimer Laser
Model Name
EKF-000
Series
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Data
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LASER & PHYSICS

Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC

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Manufacturer
LASER & PHYSICS
Product Type
Machine
Brand
-
SKU
127002
Product Name
Excimer Laser
Model Name
EKF-000, ECL-000, EAF-000
Size
-
Weight
-
Product Details

Products Detail

Various wave length and energy



Products Introduction

Model

EKF-000

ECL-000

EAF-000

Wave length

248 nm

308 nm

193 nm

Gas

KrF

XeCl

ArF

Repetion rate(Hz)

50, 100, 500, 1000

Energy/pulse (mJ)

10, 30, 50, 100. 500, 1000

Cooling

1st water, 2nd air or water

Weight

chamber : ≤ 100 kg

Dimension

723(L) x 244(w) x 194(H)


- Excimer laser for semiconductor exposure step

- Applied to LCD production line.


- Excimer laser for semiconductor exposure step

- Applied to LCD production line.


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LASER & PHYSICS
LASER & PHYSICS
Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC
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