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Excimer laser micro machining system
Model Name
LPS-EKF100
Series
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LASER & PHYSICS

Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC

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Manufacturer
LASER & PHYSICS
Product Type
Machine
Brand
-
SKU
127000
Product Name
Excimer laser micro machining system
Model Name
LPS-EKF100
Size
-
Weight
-
Product Details

Products Detail

- Excimer laser micro machining system



Products Introduction

Model    LPS-EKF100 
Laser type    KrF
Wave lenght   248 mm
Pulse repetition rate  < 200 Hz
Average energy  < 100mJ
Power stability   5 %
Warming up   30 min.
Gas lifetime   20 x 10e6 pulses
Beam dimension   10 x 20 ㎟
Beam divergence   3 x 10 mrad
Laser tube lifetime   1 x 10e8 pulses
Cooling    water 

- Micro machine by excimer laser

- High power stability by new gas circulation system

- User friendly GUI with touch screen

- Precision machining of polymers, metal films

- Stripping of wires

- Surface cleaning

- Drilling via hole


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LASER & PHYSICS
LASER & PHYSICS
Laser Module manufacturer, Eximer Laser, Semi Conductor, Display, PCB, EMC
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